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Expansion of the ablation plume created by ultraviolet laser irradiation of various target materials

Published online by Cambridge University Press:  15 March 1999

B. Angleraud
Affiliation:
Matériaux Céramiques et Traitements de Surface (UPRESA 6015 CNRS), Faculté des Sciences, 123 avenue A. Thomas, 87060 Limoges Cedex, France
J. Aubreton
Affiliation:
Matériaux Céramiques et Traitements de Surface (UPRESA 6015 CNRS), Faculté des Sciences, 123 avenue A. Thomas, 87060 Limoges Cedex, France
A. Catherinot*
Affiliation:
Matériaux Céramiques et Traitements de Surface (UPRESA 6015 CNRS), Faculté des Sciences, 123 avenue A. Thomas, 87060 Limoges Cedex, France
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Abstract

The plasma plume created during photoablation of various targets by an excimer KrF laser beam is studied in typical conditions of pulsed laser film deposition. For the examination of transport phenomena of ejected species, the space and time resolved evolution of the luminous plume is investigated by fast imaging as a function of laser fluence (from 7 to $200~\mathrm{J/cm}^{2}$ ) and nitrogen background pressure (from 5 × 10−3 to 500 Pa) for five different target materials (boron nitride, graphite, alumina, molybdenum, a superconducting oxide YBCO). Under "vacuum" (5 × 10−3 Pa and for nitrogen background pressures up to 10−1−1 Pa, the plume expands freely. For higher background pressures $(\geq 10~\mathrm{Pa})$ , three successive regions above the target can be distinguished: at first the expansion is free, then the plume expands according to a shock wave-like behaviour, and lastly a drag force model correctly describes the plume shape evolution. Velocities of the luminous plasma front and of the "mass center" of the plume are determined versus laser fluence and background nitrogen gas pressure.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 1999

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References

Saenger, K.L., Part I: Proc. Adv. Mater. 2, 1 (1993); Part II: ibid. 3, 63 (1993).
D.B. Chrisey, G.H. Hubler, Pulsed Laser Deposition of Thin Films (Wiley Interscience Publication, J. Wiley & Sons Inc., 1994).
M. von Allmen, Laser Beam Interactions With Materials (Springer Series in Material Science, 1987).
I.W. Boyd, Laser Processing of Thin Films and Microstructures (Springer Series in material Science, 1987).
A.M. Prokhorov, V.I. Konov, I. Ursu, I.N. Mihailescu, Laser Heating of Metals (Adam Hilger Series on Optics and Optoelectronics, 1990).
Surface Processing and Laser Assisted Chemistry Proceeding of Symposium E, edited by I.W. Boyd, E. Fogarassy, M. Stuke (E-MRS Spring Conference, North-Holland, 1990).
Anisimov, S.I., Sov. Phys. JETP 27, 182 (1968) .
Knight, Ch.J., AIAA J. 17, 519 (1979). CrossRef
Kelly, R., Dreyfus, R.W., Surf. Sci. 198, 263 (1988); Nucl. Instr. Meth. Phys. Res. B 32, 341 (1988). CrossRef
Noorbatcha, I., Lucchese, R., Zeiri, Y., J. Chem. Phys. 89, 5251 (1988). CrossRef
Kelly, R., J. Chem. Phys. 92, 5047 (1990). CrossRef
Kelly, R., Miotello, A., Braren, B., Gupta, A., Casey, K., Nucl. Instr. Meth. Phys. Res. B 65, 187 (1992). CrossRef
Godunov, S.K., Zabrodin, A.V., Prokopov, G.P., Z.h. Vych, Mat. 1, 1020 (1961).
Dawson, J., Kaw, P., Green, B., Phys. Fluids 12, 875 (1969). CrossRef
Singh, R.K., Narayan, J., Phys. Rev. B 41, 8843 (1990). CrossRef
Singh, R.K., Holland, O.W, Narayan, J., J. Appl. Phys. 68, 233 (1990). CrossRef
J. Hermann, Ph.D. thesis, University of Orléans, France, 1991.
Aden, M., Beyer, E., Herziger, G., Kunze, H., J. Phys. D 25, 57 (1992). CrossRef
Geohegan, D.B., Thin Solid Films 220, 138 (1992). CrossRef
Dreyfus, R.W., Phipps, C., Vertes, A., Laser Ablation: mechanisms and applications II, edited by J.C. Miller, D.B. Geohegan, Knoxville TN, AIP Conf. Proc. 275, 285 (1993). CrossRef
Lo, E.Y., Lauglin, W.T., Pugh, E.R., Laser Ablation: mechanisms and applications II, edited by J.C. Miller, D.B. Geohegan, Knoxville TN, AIP Conf. Proc. 275, 291 (1993). CrossRef
Aden, M., Kreutz, E.W., Voss, A., J. Phys. D 26, 1545 (1993). CrossRef
Fried, D., Reck, G.P., Kushida, T., Kim, G., Rothe, E.W., Appl. Spectr. 47, 1046 (1993). CrossRef
W. Pietch, Ph.D. thesis, University of Orléans, France, 1994.
B. Angleraud, Ph.D. thesis, University of Limoges, France, 1995.
Proyer, S., Stangl, E., Appl. Phys. A 60, 573 (1995). CrossRef
Geohegan, D.B., Puretzky, A.A., Appl. Phys. Lett. 67, 197 (1995). CrossRef
Pietsch, W., Dubreuil, B., Briand, A., Appl. Phys. B 61, 267 (1995). CrossRef
Angleraud, B., Girault, C., Champeaux, C., Garrelie, F., Germain, C., Catherinot, A., Appl. Surf. Sci. 96-98, 117 (1996). CrossRef
Mirkarimi, P.B., McCarty, K.F., Medlin, D.L., Wolfer, W.G., Friedmann, T.A., Klaus, E.J., Cardinale, G.F., Howitt, D.G., J. Mat. Res. 9, 2925 (1994). CrossRef
Germain, C., Girault, C., Aubreton, J., Catherinot, A., Bec, S., Tonck, A., Diamond Rel. Mat. 4, 309 (1995). CrossRef
Ren, Z.M., Du, Y.C., Qiu, Y.X., Nu, J.D., Ying, Z.F., Xiong, X.X., Li, F.M., Phys. Rev. B: Cond. Mat. 51, 5274 (1995). CrossRef
Zhang, Z.J., Fan, S., Lieber, C.M., Appl. Phys. Lett. 66, 3582 (1995). CrossRef
Lin, W.T., Meng, L.C., Chen, G.J., Liu, H.S., Appl. Phys. Lett. 66, 2066 (1995). CrossRef
Champeaux, C., Marchet, P., Aubreton, J., Mercurio, J.P., Catherinot, A., Appl. Surf. Sci. 69, 335 (1993). CrossRef
Girault, C., Damiani, D., Champeaux, C., Marchet, P., Germain, C., Mercurio, J.P., Aubreton, J., Catherinot, A., Appl. Surf. Sci. 46, 78 (1990). CrossRef
B. Angleraud, C. Champeaux, C. Girault, J. Aubreton, A. Catherinot, Escampig 94 (XII) Eindhoven ed. MCM van de Sanden Eur. Phys. Society august the 23 - 26th (1994) 304.
A. Catherinot, A. Angleraud, J. Aubreton, C. Champeaux, C. Germain, C. Girault, Surface Treatment and Film Deposition, NATO ASI series Profs, edited by O. Conde, J. Mazunder, R. Vilar (Kluwer Academic publishers Lisbon Portugal 1995), Chap. Laser Processing.
Kools, J.C.S., Baller, T.S., Dezwart, S.T., Dieleman, J., J. Appl. Phys. 71, 4547 (1992). CrossRef
Ya.B. Zel'dovich, Yu. Raizer, Physics of shock-waves and high-temperature phenomena (Academic Press New-York and London, 1966), p. 94.