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Characterization of carbon nanotubes and carbon nitride nanofibres synthesized by PECVD

Published online by Cambridge University Press:  25 May 2006

S. Point ,
T. Minea ,
M.-P. Besland  and
A. Granier
S. Point*
Affiliation:
Institut des Matériaux Jean Rouxel, IMN Nantes, 2 rue de la Houssinière, BP 32229, 44322 Nantes Cedex, France
T. Minea
Affiliation:
Institut des Matériaux Jean Rouxel, IMN Nantes, 2 rue de la Houssinière, BP 32229, 44322 Nantes Cedex, France
M.-P. Besland
Affiliation:
Institut des Matériaux Jean Rouxel, IMN Nantes, 2 rue de la Houssinière, BP 32229, 44322 Nantes Cedex, France
A. Granier
Affiliation:
Institut des Matériaux Jean Rouxel, IMN Nantes, 2 rue de la Houssinière, BP 32229, 44322 Nantes Cedex, France
*
[email protected]
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Abstract

This paper presents a novel dual plasma enhanced chemical vapor deposition (PECVD) process developed to grow carbon nitride nanofibres (CN-NFs) at room temperature (RT) and its basic version used to grow multi-walled carbon nanotubes (MWCNTs) at temperatures as low as 550 °C. The dual process alternates two low pressure-high density plasmas, one inductively coupled (ICP) and the other one excited by distributed electron cyclotron resonance (DECR). MWCNTs can be synthesized using only the DECR plasma source. The paper focuses on the comparison between CN-NFs and MWCNTs detailing their structure as revealed by transmission electron microscopy (TEM), X-ray photo electron spectroscopy (XPS) and Raman spectroscopy.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 34 , Issue 2: 15th International Colloquium on Plasma processes (CIP 2005) , May 2006 , pp. 157 - 163
Copyright
© EDP Sciences, 2006

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