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Backscattering of electrons from selected oxides:MgO, SiO2, and Al2O3

Published online by Cambridge University Press:  15 February 1999

M. Dapor  and
A. Miotello
M. Dapor
Affiliation:
Advanced Materials Division, ITC and INFM, 38050 Povo, Trento, Italy
A. Miotello
Affiliation:
INFM and Physics Department, Trento University, 38050 Povo, Trento, Italy
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Abstract

The inelastic and elastic cross-sections of an interacting electron beam with MgO, SiO2, and Al2O3 have been calculated and tabulations are provided for primary electron energies lower than 10 keV.By using the tabulated cross-sections, a Monte-Carlo simulation isutilized to obtain the backscattering coefficient in the energyrange 1–10 keV

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 5 , Issue 2 , February 1999 , pp. 143 - 148
Copyright
© EDP Sciences, 1999

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References

Ashley, J.C., J. Electron. Spectrosc. Relat. Phenom. 46, 199 (1988). CrossRef
Henke, B.L., Lee, P., Tanaka, T.J., Shimabukuro, R.L., Fujikawa, B.K., At. Data Nucl. Data Tab. 27, 1 (1982). CrossRef
Lin, S.-R., Sherman, N., Percus, J.-K., Nucl. Phys. 45, 492 (1963). CrossRef
Bunyan, P.J., Schonfelder, J.-L., Proc. Phys. Soc. 85, 455 (1965) CrossRef
Mott, N.F., Proc. R. Soc. Lond. Ser. 124, 425 (1929). CrossRef
Furness, J.B., McCarthy, I.E., J. Phys. B 6, 2280 (1973). CrossRef
Pages, L., Bertel, E., Joffre, H., Sklavenitis, L., At. Data 4, 1 (1972). CrossRef
Ashley, J.-C., Anderson, V.E., IEEE Trans. Nucl. Sci. NS28, 4132 (1981).
Baró, J., Sempau, J., Fernández-Varea, J.M., Salvat, F., Nucl. Instrum. Meth. B 100, 31 (1995). CrossRef
Battye, F.L., Jenkin, J.K., Liesegang, J., Leckey, R.C.G., Phys. Rev. B 9, 2887 (1974). APS Link not valid for this citation CrossRef
Flitsch, R., Raider, S.I., J. Vac. Sci. Technol. 12, 305 (1975). CrossRef
Ishizaka, A., Iwata, S., Kamigaki, Y., Surf. Sci. 84, 355 (1979). CrossRef
Tanuma, S., Powell, C.J., Penn, D.R., Surf. Interf. Anal. 17, 927 (1991). CrossRef
Akkerman, A., Boutboul, T., Breskin, A., Chechik, R., Gibrekhterman, A., Lifshitz, F., Phys. Stat. Sol. (b) 198, 769 (1996). CrossRef
Joy, D.C., Scanning 17, 270 (1995). CrossRef
Bromberg, J.P., J. Chem. Phys. 52, 1243 (1970). CrossRef
Dubois, R.D., Rudd, M.E., J. Phys. B: At. Mol. Phys. 9, 2657 (1976) CrossRef
Dapor, M., Nucl. Instrum. Meth. B 95, 470 (1995); ibid. 108, 363 (1996). CrossRef
Dapor, M., J. Appl. Phys. 77, 2840 (1995). CrossRef
Dapor, M., J. Appl. Phys. 79, 8406 (1996). CrossRef
Dapor, M., Miotello, A., Phys. Rev. B 56, 2234 (1997). CrossRef
Miotello, A., Dapor, M., Phys. Rev. B 56, 2241 (1997). CrossRef
Dapor, M., Miotello, A., Surf. Interf. Anal. 26, 531 (1998). 3.0.CO;2-O>CrossRef
Dapor, M., Miotello, A., At. Data Nucl. Data Tab. 69, 1 (1998). CrossRef
Riley, M., MacCallum, C.J., Biggs, F., At. Data Nucl. Data Tab. 15, 443 (1975). CrossRef