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Published online by Cambridge University Press: 07 August 2017
A family of virtual phase (VP) CCD array image sensors for various industrial and scientific applications has been designed, fabricated and tested. All share the common concept of a “2.5-phase” photosensitive cell, combining the advantages of known “1.5-phase” VP devices (increased quantum efficiency, especially in the UV, and radiation hardness) with the simpler fabrication process and extended functionality of three-phase devices.