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CCD Imagers by Enhanced UV Sensitivity for Industrial and Scientific Applications

Published online by Cambridge University Press:  07 August 2017

G. I. Vishnevsky
Affiliation:
“Electron” Research Institute, St. Petersburg
M. G. Vydrevich
Affiliation:
“Electron” Research Institute, St. Petersburg
L. Yu. Lazovsky
Affiliation:
“Electron” Research Institute, St. Petersburg
V. G. Kossov
Affiliation:
“Electron” Research Institute, St. Petersburg
S. S. Tatautshchikov
Affiliation:
“Electron” Research Institute, St. Petersburg

Abstract

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A family of virtual phase (VP) CCD array image sensors for various industrial and scientific applications has been designed, fabricated and tested. All share the common concept of a “2.5-phase” photosensitive cell, combining the advantages of known “1.5-phase” VP devices (increased quantum efficiency, especially in the UV, and radiation hardness) with the simpler fabrication process and extended functionality of three-phase devices.

Type
Section II — Poster Papers
Copyright
Copyright © Kluwer 1995