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Zinc Diffusion Rates and Profiles in AlGaAs Alloys

Published online by Cambridge University Press:  26 February 2011

F. T. J. Smith
F. T. J. Smith*
Affiliation:
Eastman Kodak Company Corporate Research Laboratories, Rochester, NY 14650–2011
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Abstract

The diffusion rate of Zn in AlxGa1−xAs alloys has been determined, for values of x up to 1.0, as a function of temperature. At 625°C the diffusion coefficient shows a strong dependence on x, reaching a maximum at about 65% Al. A similar rapid increase in diffusion coefficient with x is seen at 700°C. The zinc concentration profiles are similar for all values of x, showing a very abrupt diffusion front. The activation energy for diffusion decreases with increasing x.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 240: Symposium E – Advanced III-V Compound Semiconductor Growth, Processing and Devices , 1991 , 727
Copyright
Copyright © Materials Research Society 1992

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References

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