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Thin Nano- and Microcrystalline CVD Diamond Films for Micro-channel Cooling: Thermal and Elastic Properties

Published online by Cambridge University Press:  11 March 2011

Robbe Salenbien ,
Jan Sermeus ,
Paulius Pobedinskas ,
Christ Glorieux  and
Ken Haenen
Robbe Salenbien
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Jan Sermeus
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Paulius Pobedinskas
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium
Christ Glorieux
Affiliation:
Katholieke Universiteit Leuven, Departement Natuurkunde, Laboratorium voor Akoestiek en Thermische Fysica, Leuven, Belgium
Ken Haenen
Affiliation:
Hasselt University, Institute for Materials Research (IMO), Diepenbeek, Belgium IMEC vzw, Division IMOMEC, Diepenbeek, Belgium
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Abstract

Thin nano- to microcrystalline diamond (N/MCD) films were deposited on silicon substrates using plasma enhanced microwave chemical vapor deposition. Selected layers were covered with a thin metal layer of Cr to enhance their optical absorption characteristics for photothermal and photoacoustic experiments. A heterodyne diffraction method was used to investigate the thermoelastic signatures of the N/MCD layers. While the dispersion of surface acoustic waves turned out to be difficult to determine due to high optical scattering from the diamond crystallites, it was found that a diamond film of ~ 2 μm thick is enhancing the thermal diffusion along the surface.

Keywords

diamondthermal conductivitynanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1282: Symposium A – Diamond Electronics and Bioelectronics—Fundamentals to Applications IV , 2011 , mrsf10-1282-a15-02
Copyright
Copyright © Materials Research Society 2011

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References

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