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TEM Investigation of the Ferroelectric Domain Structure in Sputtered PZT Thin Films

Published online by Cambridge University Press:  16 February 2011

J.P. Goral ,
Maria Huffman  and
M.M. Al-Jassim
J.P. Goral
Affiliation:
Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
Maria Huffman
Affiliation:
Ramtron Corporation, 1873 Austin Bluffs Parkway, Colorado Springs, Colorado 80918
M.M. Al-Jassim
Affiliation:
Solar Energy Research Institute, 1617 Cole Boulevard, Golden, Colorado 80401
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Abstract

The ferroelectric domain structure in sputtered lead zirconate titanate (PZT) thin films has been investigated using transmission electron microscopy (TEM) and transmission electron diffraction (TED). The individual ferroelectric domains occur as {110}-type microtwins as is observed in the bulk ceramic. The arrangement and size of the ferroelectric domains is strongly dependent on the microstructure of the sputtered film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 225
Copyright
Copyright © Materials Research Society 1990

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References

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