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Substrate Influenced Nucleation and Crystallization of LiNbO3 Thin Films Made by Sol-Gel

Published online by Cambridge University Press:  21 February 2011

Vikram Joshi ,
Debasis Roy  and
Martha L. Mecartney
Vikram Joshi
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
Debasis Roy
Affiliation:
Materials Science and Engineering Program, University of California, Irvine, CA 92717
Martha L. Mecartney
Affiliation:
Materials Science and Engineering Program, University of California, Irvine, CA 92717
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Abstract

Lithium niobate films were deposited on amorphous carbon, silicate glass, (0001) sapphire, and (100) silicon by spin or dip coating double metal ethoxide sols. The crystallinity and microstructure of the deposited films were examined by XRD and TEM. Crystallization behavior and resulting microstructure were strongly influenced by the type of substrate. The formation of crystalline LiNbO3 on amorphous carbon was detected at room temperature. Randomly oriented polycrystalline films were obtained on glass at 400°C. Choice of one mole of water per mole of ethoxide generated heteroepitaxial growth of LiNbO3 thin films on (0001) sapphire. Oriented but polycrystalline films were obtained on silicon. The electrical behavior of film on silicon was evaluated in metal-ferroelectric-semiconductor configuration. A dielectric constant of 35 and a dissipation factor of 0.004 was measured at 100 KHz.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 287
Copyright
Copyright © Materials Research Society 1993

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