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Submicron Roughness Determination at the Si-SiO2 Interface and Correlations to Prccessing Steps and Electronic Properties
Published online by Cambridge University Press: 22 February 2011
Abstract
A newly developed optical surface characterization technique using the diffuse scattered light of two laser beams will be presented. The method determines root-mean-square roughness values (RMS) of surfaces down to 1 Å and corresponding correlation lengths in the submicron area.
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- Copyright © Materials Research Society 1988
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