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SrTiO3/BaTiO3 Artificial Superlattices Obtained by Injection MOCVD
Published online by Cambridge University Press: 10 February 2011
Abstract
SrTiO3/BaTiO3 superlattices were deposited using injection MOCVD. The films obtained on LaAlO3(LAO), Al2O3, SrTiO3(STO) and SrTiO3:Nb(STO:Nb) were charcterized using X-ray diffraction. While the films on LaAlO3 (012), SrTiO3(100) and SrTiO3:Nb (100) were epitaxial, the multilayers deposited on Al2O3(0001)were highly oriented, but displaying two different in-plane orientations. To our knowledge, this is the first time that BTO/STO superlattices were deposited by MOCVD.
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