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Sol-Gel Growth of High-Quality Pb(Zr,Ti)O3 Films on RUO2 Using Seed Layers
Published online by Cambridge University Press: 10 February 2011
Abstract
New approaches for improving fatigue performance of sol-gel PZT based ferroelectric capacitors with RuO2 electrodes are discussed. The use of thin (∼5 nm) high-Ti PZT seed layer was found to be effective for improving fatigue performance. For an optimized seedlayer thickness, FECAPs with excellent fatigue characteristics (less than 10% decrease in Pr after 1011 cycles) were obtained.
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- Copyright © Materials Research Society 1999
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