Hostname: page-component-848d4c4894-8bljj Total loading time: 0 Render date: 2024-07-02T20:22:01.743Z Has data issue: false hasContentIssue false
  • English
  • Français

Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research

Published online by Cambridge University Press:  15 February 2011

F. Dimeo Jr., ,
S. Semancik ,
R. E. Cavicchi ,
J. S. Suehle ,
N. H. Tea ,
M. D. Vaudin  and
J. T. Kelliher
F. Dimeo Jr.,
Affiliation:
Process Measurements Division, [email protected], [email protected]
S. Semancik
Affiliation:
Process Measurements Division, [email protected], [email protected]
R. E. Cavicchi
Affiliation:
Process Measurements Division, [email protected], [email protected]
J. S. Suehle
Affiliation:
Semiconductor Electronics Division
N. H. Tea
Affiliation:
Semiconductor Electronics Division
M. D. Vaudin
Affiliation:
Ceramics Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899
J. T. Kelliher
Affiliation:
Microelectronics Research Laboratory, Columbia, MD 21045
Get access

Abstract

An abstract is not available for this content so a preview has been provided. Please use the Get access link above for information on how to access this content.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 203
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 P. Moseley, T., Stoneham, A. M., and Williams, D. E., “Chapter 4. Oxide Semiconductors: Pattern of Gas Response Behavior According to Material Type,” in Techniques and Mechanisms in Gas Sensing, edited by Moseley, P T, Norris, J., and Williams, D.E. (Adam Hilger, Bristol, 1991), pp. 108–138.Google Scholar
2 Taguchi, N., UK Patent No. 1280809 (1970).Google Scholar
3 Suehle, J. S., Cavicchi, R. E., Gaitan, M., and Semancik, S., IEEE Elec. Dev. Lett 14 (3), 118–120 (1993).Google Scholar
4 Semancik, S., Cavicchi, R. E., Gaitan, M., and Suehle, J. S., U.S. Patent No. 5345213 (1994).Google Scholar
5 F. DiMeo et al. to be published.Google Scholar
6 Disclaimer, Commercial Products are identified only to specify experimental procedure. This in no way implies recommendation or endorsement by the National Institute of Standards and Technology (1996).Google Scholar