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Self-Lubricating, TiN-MoS2 Composite Coatings Produced by Simultaneous Deposition from Ti((CH3) 2N)4/NH3/MoF6/H2S GAS Mixtures

Published online by Cambridge University Press:  15 February 2011

Y. W. Bae ,
W. Y. Lee ,
T. M. Besmann ,
P. J. Blau ,
K. L. More  and
D. N Braski
Y. W. Bae
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
W. Y. Lee
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
T. M. Besmann
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
P. J. Blau
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
K. L. More
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
D. N Braski
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831–6063
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Abstract

Composite coatings consisting of discrete phases of TiN and MoS2 were codeposited on graphite substrates from Ti((CH3)2N)4/NH3/MoF6/H2S gas mixtures in a cold-wall reactor at 1073 K and 1.3 kPa. Chemical composition and microstructure of the coatings were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron microscopy. Kinetic friction coefficients of the coatings were determined by a computer-controlled friction microprobe and values less than 0.2 were obtained with a type-440C stainless-steel counterface under ambient condition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 363 , 1994 , 231
Copyright
Copyright © Materials Research Society 1995

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References

1. Mikkelsen, N. J. and Sorensen, , Mater. Sci. Eng., A115, 343 (1989).Google Scholar
2. Hilton, M. R., Bauer, R., Didziuls, S. V., and Fleischauer, P. D., Thin Solid Film 201, 49 (1991).Google Scholar
3. Bhattacharya, R. S. and Rai, A. K., Nucl. Instrum. Methods B59/60 788 (1991).Google Scholar
4. Bae, Y. W., Lee, W. Y., Besmann, T. M., and Blau, P. J., “Selected Micro-Mechanical Properties of TiN Films Deposited from Ti((CH3) 2N) 4/NH3 Gas Mixtures” Presented at '94 Materials Research Society Fall Meeting, Boston, MA.Google Scholar
5. Blau, P. J. and Yust, C. S., Surface and Coatings Technol., 62, 380 (1993).Google Scholar