Published online by Cambridge University Press: 31 January 2011
Reduction of parasitic capacitances and improvement of the on-off current ratio (ION/IOFF) can be achieved by increasing the gate control in Field Effect Transistors (FETs). Multiple gated FETs (MugFETs) lend themselves well for this. The MugFET investigated in this manuscript is the Screen Grid FET (SGrFET) that consists of multiple gate cylinders inside the channel perpendicular to the current flow. In this work we illustrate, using 2D Technology Computer Aided Design (TCAD), that the multiple geometrical degrees of freedom of the SGrFET can be exploited to simultaneously optimise the on-current, ION and the gate-drain Miller parasitic capacitance for increased switching speed.