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Optical Characteristics of Planar Waveguides in Simox Structures
Published online by Cambridge University Press: 15 February 2011
Abstract
Results are presented for the propagation loss of planar optical waveguides fabricated in SIMOX structures with Si overlayers whose thickness varies from 0.57 μm to 6.0 μm. The results demonstrate that thick Si overlayers are required to produce propagation losses below 1 dB/cm. In addition, the results of the coupling between two vertically integrated waveguides formed using two buried SiO2 layers are also reported.
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- Copyright © Materials Research Society 1992
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