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Material Aspects of A-Sin:H Based 2D Direct X-Ray Sensor Array

Published online by Cambridge University Press:  10 February 2011

I. Popov ,
G. Van Doorselaer ,
A. Van Calster ,
H. De Smet ,
E. Boesman  and
F. Callens
H. De Smet
Affiliation:
ELIS-TFCG/IMEC, University of Ghent, Ghent, Belgium
F. Callens
Affiliation:
CSSS, University of Ghent, Ghent, Belgium
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Abstract

The possibility of creating an 2D X-ray sensor array on the base of a-SiN:H thin films without switching elements and an X-ray conversion layer is presented in this report. The behavior of a-SiN:H Thin-Film Diode under X-ray irradiation, its limitations, and ways of increasing long-term stability and sensitivity of the sensor are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 507: Symposium A – Amorphous & Microcrystalline Silicon Technology 1998 , 1998 , 231
Copyright
Copyright © Materials Research Society 1998

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References

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