Massively Parallel Scanning Probe Microscopy is an obvious path for enhancing the acquisition speed and the imaging range of current based-AFM metrology devices. Current experimental systems, based on active probes array, would reach their limits in density and hardware complexity. This paper presents a new approach with the promise to break several of these barriers. The key idea is readout of a Scanning Probes Microscope (SPM) array by an interferometer technique called digital holography which directly gives the cantilever phase information at each pixel of a CCD array. This means that no contact line to each individual SPM probes is needed, allowing us to reach very high density of probes. The phase information is available in a parallel form in real-time. Moreover, the digital holography optical setup (Digital Holography Microscope or DHM) needs in principle no expensive components, optical (or, to a large extent, mechanical) imperfections being compensated in the signal processing, i.e. in electronics. This gives the system the potential for a low cost device with fast and large readout capability.