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Low Temperature Device Processing Technology for II-VI Semiconductors

Published online by Cambridge University Press:  21 February 2011

D.L. Dreifus ,
R.M. Kolbas ,
B.P. Sneed  and
J.F. Schetzina
D.L. Dreifus
Affiliation:
Department of Electrical and Computer Engineering, North Carolina State University, Raleigh NC 27695-7911
R.M. Kolbas
Affiliation:
Department of Electrical and Computer Engineering, North Carolina State University, Raleigh NC 27695-7911
B.P. Sneed
Affiliation:
Department of Physics, North Carolina State University, Raleigh, NC 27695-8202
J.F. Schetzina
Affiliation:
Department of Physics, North Carolina State University, Raleigh, NC 27695-8202
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Abstract

Low temperature (<60° C) processing technologies that avoid potentially damaging processing steps have been developed for devices fabricated from II-VI semiconductor epitaxial layers grown by photoassisted molecular beam epitaxy (MBE). These low temperature technologies include: 1) photolithography (1 µm geometries), 2) calibrated etchants (rates as low as 30 Å/s), 3) a metallization lift-off process employing a photoresist profiler, 4) an interlevel metal dielectric, and 5) an insulator technology for metal-insulator-semiconductor (MIS) structures. A number of first demonstration devices including field-effect transistors and p-n junctions have been fabricated from II-VI epitaxial layers grown by photoassisted MBE and processed using the technology described here. In this paper, two advanced device structures, processed at <60° C, will be presented: 1) CdTe:As-CdTe:In p-n junction detectors, grown in situ by photoassisted MBE, and 2) HgCdTe-HgTe-CdZnTe quantum-well modulation-doped field-effect transistors (MODFETs).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 161: Symposium E – Properties of II-VI Semiconductors: Bulk Crystals, Epitaxial Films, Quantum Well Structures, and Dilute Magnetic Systems , 1989 , 323
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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