No CrossRef data available.
Article contents
Laser-Stimulated Changing of Micromechanical Properties in the Monocrystalline and Porous Silicon
Published online by Cambridge University Press: 21 February 2011
Abstract
The optical and mechanical properties of silicon surface subjected to thermal, chemical, electromechanical and laser treatment have been studied. A special electroluminescence spectrum of silicon monocrystal with porous layer obtained by means of selective etching has been given. It was shown that radiating of monocrystal and porous silicon by laser irradiation with the energy of (1÷5)• 105j/m2 (λ=1,06 μm) allowed to change their microplasticity and microhardness by 20 -50%.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1994