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Laser Ultrasonic Measurement of Thin Film Elastic Properties
Published online by Cambridge University Press: 26 February 2011
Abstract
A technique is presented for measurement of elastic properties of thin films from 0.001-0.025 mm in thickness. Lamb Waves were excited in free standing films with a pulsed Nd:YAG laser, and detected using heterodyne interferometry. Elastic properties were calculated from time-of-flight measurements. Variability in waveform structure with film thickness was observed, and interpreted with respect to extraction of elastic property information. An explanation is offered for changes in waveform structure, and common features are highlighted.
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- Copyright © Materials Research Society 1991