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Large Area Flexible Electronics Fabrication by Selective Laser Sintering of Nanoparticles with a Scanning Mirror

Published online by Cambridge University Press:  31 January 2011

Seung Hwan Ko ,
Heng Pan ,
Nico Hotz  and
Costas P. Grigoropoulos
Seung Hwan Ko
Affiliation:
[email protected]@kaist.ac.kr, KAIST, Mechanical Engineering, Daejeon, Korea, Republic of
Heng Pan
Affiliation:
[email protected], UC Berkeley, Mechanical Engineering, Berkeley, California, United States
Nico Hotz
Affiliation:
[email protected], UC Berkeley, Mechanical Engineering, Berkeley, California, United States
Costas P. Grigoropoulos
Affiliation:
[email protected], UC Berkeley, Mechanical Engineering, Berkeley, California, United States
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Abstract

The development of electric circuit fabrication on heat and chemically sensitive polymer substrates has attracted significant interest as a pathway to low-cost or large-area electronics. We demonstrated the large area, direct patterning of microelectronic structures by selective laser sintering of nanoparticles without using any conventional, very expensive vacuum or photoresist deposition steps. Surface monolayer protected gold nanoparticles suspended in organic solvent was spin coated on a glass or polymer substrate. Then low power continuous wave Ar-ion laser was irradiated as a local heat source to induce selective laser sintering of nanoparticles by a scanning mirror system. Metal nanoparticle possessed low melting temperature (<150°C) due to thermodynamic size effect, and high laser absorption due to surface plasmon mode. These make metal nanoparticles ideal for the low temperature, low laser energy selective laser processing, and further applicable for electronics fabrication on a heat sensitive polymer substrate. We extended our laser selective sintering of nanoparticles research to a large area (> 4” wafer) using scanning mirror to demonstrate current technology for industry level fabrication.

Keywords

laser-induced reactionmetallic conductormicroelectronics
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1196: Symposium C – Large-Area Processing and Patterning for Optical. Photovoltaic and Electronic Devices-2009 , 2009 , 1196-C03-04
Copyright
Copyright © Materials Research Society 2010

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