Hostname: page-component-848d4c4894-4rdrl Total loading time: 0 Render date: 2024-07-05T12:18:59.725Z Has data issue: false hasContentIssue false

Ion-assisted Laser Deposition of CaF2 thin Films onto Ccold Substrates

Published online by Cambridge University Press:  21 February 2011

N. S. Gluck
Affiliation:
Rockwell International Science Center, 1049 Camino Dos Rios, Thousand Oaks, CA 91360
H. Sankur
Affiliation:
Rockwell International Science Center, 1049 Camino Dos Rios, Thousand Oaks, CA 91360
W. J. Gunning
Affiliation:
Rockwell International Science Center, 1049 Camino Dos Rios, Thousand Oaks, CA 91360
Get access

Abstract

Thin CaF2 films were grown at low temperatures (20°C) using an ion-beamassisted laser evaporation method. Smooth, dense, environmentally stable coatings with bulk refractive indices were produced. This technique was applied to deposit mid-wave IR dichroic filters using CaF2 and Ge layers onto cold substrates.

Type
Research Article
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Gibson, U.J. and Kennemore, C.M. III, Thin Solid Films, 124, 27, (1985).CrossRefGoogle Scholar
2. Targove, J.D., Messerly, M.J., Lehan, J.P., Weng, C.C., Potoff, R.H., and Macleod, H.A., Proc. SPIE, 678, 115 (1986).CrossRefGoogle Scholar
3. Sankur, H. and Gunning, W., “Deposition of Optical Thin Films by Pulsed Laser-Assisted Evaporation,” presented at the OSA Topical Meeting on Optical Interference Coatings in Tucson, AZ, April 12–15, 1988. To be published in the special issue of Applied Optics on Optical Interference Coatings.CrossRefGoogle Scholar
4. Cheung, J.T. and McGee, T., J. Vac. Sci. Technol. 1A, 1604 (1983).CrossRefGoogle Scholar
5. Sankur, H. and Cheung, J.T., J. Vac. Sci. Technol. 1A, 1806 (1983).CrossRefGoogle Scholar
6. Sankur, H. and Southwell, W.H., Appl. Opt. 23, 2770 (1984).CrossRefGoogle Scholar