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Ion Beam Assisted Deposition- R&D to Production

Published online by Cambridge University Press:  22 February 2011

James K. Hirvonen
James K. Hirvonen*
Affiliation:
Metals Research Branch, Materials Directorate U. S. Army Research Laboratory, Watertown, MA 02172-0001
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Abstract

Ion Beam Assisted Deposition (IBAD) involves vacuum deposition processes which incorporate concurrent energetic ion bombardment and material deposition. The effects of the ions are to promote adhesion, densify the films, and to help chemically incorporate reactive ions into the coatings. Examples of IBAD studies that have progressed from R&D to production status are presented with a discussion of the technical and marketing factors influencing their commercial acceptance.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 545
Copyright
Copyright © Materials Research Society 1994

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References

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