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Ion Beam Assisted Deposition- R&D to Production

Published online by Cambridge University Press:  22 February 2011

James K. Hirvonen
James K. Hirvonen*
Affiliation:
Metals Research Branch, Materials Directorate U. S. Army Research Laboratory, Watertown, MA 02172-0001
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Abstract

Ion Beam Assisted Deposition (IBAD) involves vacuum deposition processes which incorporate concurrent energetic ion bombardment and material deposition. The effects of the ions are to promote adhesion, densify the films, and to help chemically incorporate reactive ions into the coatings. Examples of IBAD studies that have progressed from R&D to production status are presented with a discussion of the technical and marketing factors influencing their commercial acceptance.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 545
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1 Hirvonen, J.K., Mat. Sci. Reports 6 (6), 215–274 (1991).Google Scholar
2 Baba, Y. and Sasaki, T.A., Mat. Sci. Eng. A115, 203 (1989).Google Scholar
3 Kant, R.A. and Sartwell, B.D., J. Vac. Sci. Technol. A8, 861 (1990).Google Scholar
4 Baglin, J.E.E., in Handbook of Ion Beam Processing Technology, eds., Cuomo, J., Rossnagel, S., Kaufman, H. (Noyes Pub., Park Ridge, NJ, 1989) pp. 279–297.Google Scholar
5 Baglin, J.E.E., Schrott, A.G., Thompson, R.D., Tu, K.N. and Segmuller, A., Nucl. Instr. Methods B19/20, 782 (1987).Google Scholar
6 Movchan, B.A. and Demchishin, A.V., Phys. Met. Metallogr. 28, 83 (1969).Google Scholar
7 Grovenor, C.R.M., Hentzell, H.T.G., and Smith, D.A., Acta Metall. 32, 773 (1984).Google Scholar
8 Müller, K.H., Phys. Rev. B35, 1796 (1987); J. Appl. Phys. 62, 1796 (1987).Google Scholar
9 Roy, R.A., Yee, D.S. and Cuomo, J.J., Mat. Res. Soc. Symp. Proc. 128, 23 (1989).Google Scholar
10 Martin, P.J., Netterfield, R.P. and Sainty, W.G., J. Appl. Phys. 55, 235 (1984).Google Scholar
11 Martin, P.J., Macleod, H.A., Netterfield, R.P., Paceyand, C.G. Sainty, W.G., Appl. Optics 22, 178 (1983).Google Scholar
12 Culver, T.R., Pawlewicz, W.T., Zachistal, J.H., McCandless, J.A., Chiello, M.W., and Walters, S., SPIE Proc. 1848, 192–199 (1992).Google Scholar
13 Pawlewicz, W.T., Culver, T.R., Zachistal, J.H., Prevost, E.J., Traylorand, J.D. Wheeler, C.E., SPIE Proc. 1618, 1–16 (1991).Google Scholar
14 Enzinger, W.,Schroer, A. and Wolf, G.K., Surface and Coatings Technology 51. 217–221 (1992).Google Scholar
15 Enzinger, W. and Wolf, G.K., Mater. Sci. Eng. A116, 1 (1989).Google Scholar
16 Sainty, W.G., Netterfield, R.P. and Martin, P.J., Appl. Optics 23, 1116 (1984).Google Scholar
17 Miyano, T. and Kitamura, H., Proc. 8th Int. Conf. on Surf. Modification of Metals by Ion Beams, Sept. 13-17,1993, Kanazawa, Japan. To be published in: Surface and Coatings Technology. Ed. B. Sartwell.Google Scholar