No CrossRef data available.
Article contents
High Resolution Organic Thin Film Mapping for Process Control
Published online by Cambridge University Press: 25 February 2011
Abstract
ABSTRACT; This paper describes the use of advanced circuitry nondestructive eddy current techniques to map organic Thin Films. Surface profiles, contour maps and diameter scans are obtained from the process wafers tested providing the necessary information to control the processes for maximum yield.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992