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The Formation of Smooth, Defect-free, Stoichiometric Silicon Carbide Films from a Polymeric Precursor

Published online by Cambridge University Press:  01 February 2011

Michael Pitcher  and
Patricia Bianconi
Michael Pitcher
Affiliation:
[email protected], METU, Chemistry, n/a, Ankara, n/a, 05631, Turkey
Patricia Bianconi
Affiliation:
[email protected], University of Massachusetts at Amherst, Department of Chemistry, Amherst, MA, 01003, United States
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Abstract

Silicon carbide (SiC) materials, which are used in a variety of applications, are often produced using powder processing, sintering or bulk crystal growing techniques. The formation of silicon carbide films or shaped products, via these methods, is often extremely difficult and/or requires high temperatures. Here we report the synthesis and characterization of a polymeric precursor, Polymethylsilyne (PMSy), and it subsequent conversion to â-SiC. The polymer is simple to synthesize and is easily manipulated in air. The ceramic produced from PMSy is extremely pure, stoichiometric SiC and is produced in high yields (up to 85%). The ceramic films that can be produced from PMSy on a variety of substrates, from ceramics to metals, are again stoichiometric SiC and are smooth, continuous and defect free; possibly enabling the use of these films in electronic applications.

Keywords

polymerceramicfilm
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 911: Symposium B – Silicon Carbide 2006 – Materials, Processing and Devices , 2006 , 0911-B05-01
Copyright
Copyright © Materials Research Society 2006

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