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Fabrication of Nano-Crystalline Porous Silicon on Si Substrates by a Plasma Enhanced Hydrogenation Technique

Published online by Cambridge University Press:  01 February 2011

Y. Abdi ,
P. Hashemi ,
F. Karbassian ,
F.D. Nayeri ,
A. Behnam ,
S. Mohajerzadeh ,
J. Koohsorhki ,
M.D. Robertson  and
E. Arzi
Y. Abdi
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected] Department of Physics, University of Tehran, Tehran, Iran.
P. Hashemi
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected]
F. Karbassian
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected]
F.D. Nayeri
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected]
A. Behnam
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected]
S. Mohajerzadeh
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected]
J. Koohsorhki
Affiliation:
Thin Film Laboratory, University of Tehran, Tehran, Iran, +98-21 801 1235, e-mail: [email protected] Department of Physics, University of Tehran, Tehran, Iran.
M.D. Robertson
Affiliation:
Department of Physics, Acadia University, Wolfville, NS,Canada.
E. Arzi
Affiliation:
Department of Physics, University of Tehran, Tehran, Iran.
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Abstract

A novel plasma hydrogenation method for the fabrication of nano-crystalline structures of silicon as well as the photoluminescence and structural properties of these porous structures is presented. We have observed that the hydrogenation process followed by an annealing treatment results in the formation of nano-crystalline silicon structures where increased temperatures during hydrogenation reduces the grain size. Furthermore, by increasing the time of the hydrogenation process, the density of the silicon grains is increased.

Photoluminescence (PL) spectroscopy demonstrated the presence of a direct gap in the visible light range where materials with a smaller grain size emitted light at lower wavelengths, and a higher density of grains resulted in higher amplitudes in the PL spectrum. TEM and SEM characterization of these samples and the structure-emission relationship are also presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 862: Symposium A – Amorphous and Nanocrystalline Silicon Science and Technology–2005 , 2005 , A19.1
Copyright
Copyright © Materials Research Society 2005

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