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The Effect of Surface States on Secondary Electron (SE) Dopant Contrast from Silicon p-n Junctions

Published online by Cambridge University Press:  01 February 2011

Augustus K. W. Chee ,
Conny Rodenburg  and
Colin John Humphreys
Augustus K. W. Chee
Affiliation:
[email protected], University of Cambridge, Department of Materials Science and Metallurgy, Pembroke Street, Cambridge, CB2 3QZ, United Kingdom, +44 1223 334 368
Conny Rodenburg
Affiliation:
[email protected], University of Sheffield, Department of Engineering Materials, Mappin Street, Sheffield, S1 3JD, United Kingdom
Colin John Humphreys
Affiliation:
[email protected], University of Cambridge, Department of Materials Science and Metallurgy, Pembroke Street, Cambridge, CB2 3QZ, United Kingdom
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Abstract

Detailed computer modelling using finite-element analysis was performed for Si p-n junctions to investigate the effects of surface states and doping concentrations on surface band-bending, surface junction potentials and external patch fields. The density of surface states was determined for our Si specimens with a native oxide layer. Our calculations show that for a typical density of surface states for a Si specimen with a native oxide layer, the effects of external patch fields are negligible and the SE doping contrast is due to the built-in voltage across the p-n junction modified by surface band-bending. There is a good agreement between the experimental doping contrast and the calculated junction potential just below the surface, taking into account surface states, for a wide range of doping concentrations.

Keywords

scanning electron microscopy (SEM)Sidopant
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1026: Symposium C – Quantitative Electron Microscopy for Materials Science , 2007 , 1026-C04-02
Copyright
Copyright © Materials Research Society 2008

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