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Effect of Laser Heating on Compositions of Films Deposited from the Metal Hexacarbonyls

Published online by Cambridge University Press:  26 February 2011

K. A. Singmaster  and
F. A. Houle
K. A. Singmaster
Affiliation:
San Jose State University, Dept. of Chemistry, San Jose, CA 95192–0101
F. A. Houle
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120
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Abstract

A systematic study of the composition of metal films thermally deposited by laser heating (cw 514 nm) of the group VI hexacarbonyls is described. The films are found to contain significantly lower levels of carbon and oxygen than photochemically deposited films, and are spatially inhomogeneous. Estimates of temperature to determine the extent of laser heating permit the kinetics of this process to be compared to ∞ desorption from single crystal surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 201: Symposium A – Surface Chemistry and Beam-Solid Interactions , 1990 , 159
Copyright
Copyright © Materials Research Society 1991

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