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Diffusion of Gold Into Silicon. W-Shaped Concentration Profiles of Gold.

Published online by Cambridge University Press:  01 January 1992

A.V. Vaysleyb
Affiliation:
Department of Material Science, School of Mines, Columbia University, N.Y. 10027
J. Malinsky
Affiliation:
Department of Material Science, School of Mines, Columbia University, N.Y. 10027
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Abstract

Diffusion of gold atoms into silicon crystals was considered. It was shown that W-shaped gold profiles in silicon can be explained in the framework of both the dissociative and the kickout mechanisms.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

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