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Dielectrophoresis-Based Assembly and High-Frequency Characterization of Carbon Nanotube Bundles

Published online by Cambridge University Press:  01 February 2011

Michael Woodson ,
Alexander Tselev  and
Jie Liu
Michael Woodson
Affiliation:
[email protected], Duke University, Chemistry, 2246 FFSC, Durham, NC, 27708, United States
Alexander Tselev
Affiliation:
[email protected], Duke University, Department of Chemistry, French Family Science Center,, 124 Science Drive, Durham, NC, 27708, United States
Jie Liu
Affiliation:
[email protected], Duke University, Department of Chemistry, French Family Science Center,, 124 Science Drive, Durham, NC, 27708, United States
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Abstract

As the size of integrated circuit elements decreases, the properties of carbon nanotubes (CNTs) become increasingly attractive for interconnect applications. To be used by industry, full characterization of the electronic properties of CNT aggregates is essential.

Dielectrophoresis from CNTs suspended in liquid has been demonstrated as a simple route to bundles of aligned parallel nanotubes. We describe a method by which circuits including such bundles may be fabricated, and provide some high-frequency measurements of their electrical properties. The contributions of the contacts can be separated from those of the bundle itself.

Keywords

electrical propertiesnanoscaleC
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B04-01
Copyright
Copyright © Materials Research Society 2007

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References

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