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Determining Pore Structure and Growth Mechanisms in Templated Nanoporous Low-k Films

Published online by Cambridge University Press:  01 February 2011

Hua-Gen Peng ,
Richard S. Vallery ,
Ming Liu ,
William E. Frieze ,
David W. Gidley ,
Jin-Heong Yim ,
Hyun-Dam Jeong  and
Jongmin Kim
Hua-Gen Peng
Affiliation:
Physics Department, University of Michigan, Ann Arbor, MI 48109-1040
Richard S. Vallery
Affiliation:
Physics Department, University of Michigan, Ann Arbor, MI 48109-1040
Ming Liu
Affiliation:
Physics Department, University of Michigan, Ann Arbor, MI 48109-1040
William E. Frieze
Affiliation:
Physics Department, University of Michigan, Ann Arbor, MI 48109-1040
David W. Gidley
Affiliation:
Physics Department, University of Michigan, Ann Arbor, MI 48109-1040
Jin-Heong Yim
Affiliation:
Division of Advanced Materials Engineering, Kongju National University, 182, Sinkwan-dong, Kongju City, Chungnam, 314-701, Korea
Hyun-Dam Jeong
Affiliation:
Materials Lab., Samsung Advanced Institute of Technology (SAIT), San 14-1, Nongseori, Kiheung-eup, Yongin-shi, Kyungki-do, 449-712, Korea
Jongmin Kim
Affiliation:
Materials Lab., Samsung Advanced Institute of Technology (SAIT), San 14-1, Nongseori, Kiheung-eup, Yongin-shi, Kyungki-do, 449-712, Korea
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Abstract

Templating is one of the most popular methods for generating nanocomposite and nanoporous films and the resultant pore size and pore interconnection length depend strongly on porogen concentration/porosity among other factors. Positronium Annihilation Lifetime Spectroscopy (PALS) analysis has been performed on a series of films produced using increasing concentrations of a type of cyclodextrin (CD) porogen in a modified silsesquioxane host matrix. PALS reveals the relationship between the resulting pore structure (both size and interconnection length) and porosity, which can be used to deduce pore shape. At low porogen concentration, isolated pores are resolved, but the pore size is consistent with a cluster of two or three CD molecules, rather than an individual one. As the porosity increases, the aggregation of the porogen domains appears to be more 3-dimensional (pseudo-random) with gradual increase in pore size. Computer simulations using a random pore growth model show consistent trends for pore size growth, but the agreement is poor for interconnection length. It is a key demonstration of the usefulness of PALS in untangling the fundamental pore structure and its evolution in porosity. PALS characterization of porosity provides novel feedback in the understanding and design of nanoporous materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 863: Symposium B – Materials, Technology and Reliability of Advanced Interconnects , 2005 , B3.4
Copyright
Copyright © Materials Research Society 2005

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References

1. 2004 International Technology Roadmap for Semiconductors.Google Scholar
2. Hedrick, J.L., Miller, R.D., Hawker, C.J., Carter, K.R., Volksen, W., Yoon, D.Y. and Trollsas, M., Adv. Mater. 10, 1049 (1998).Google Scholar
3. Fayolle, M., Passemard, G., Louveau, O., Fusalba, F. and Cluzel, J., Microelectron. Eng. 70, 255 (2003).Google Scholar
4. Sun, J.N., Gidley, D.W., Hu, Y.F., Frieze, W.E., and Yang, S., Mat. Res. Soc. Symp. Proc. 726, Q10.5, (2002).Google Scholar
5. Yim, J.H., Seon, J.B., Jeong, T.D., Pu, L.Y.S., Baklanov, M.R., and Gidley, D.W., Adv. Funct. Mater. 14, 277 (2004).Google Scholar
6. Maex, K., Baklanov, M.R., Shamiryan, D., Iacopi, F., Brongersma, S.H., and Yanovitskaya, Z.S., J. Appl. Phys. 93, 8793 (2003) and references therein.Google Scholar
7. Dull, T.L., Frieze, W.E., Gidley, D.W., Sun, J.N., and Yee, A.F., J. Phys. Chem. B 105, 4657 (2001) and references therein.Google Scholar
8. Polarz, S., Smarsly, B., Bronstein, L. and Antonietti, M., Angewandte Chemie-International Edition 40, 4417 (2001)Google Scholar
9. Hoshen, J. and Kopelman, R., Phys. Rev. B 14, 3438 (1976).Google Scholar
10. Peng, H.G., Vallery, R.S., Frieze, W.E., Liu, M., Gidley, D.W., Yim, J.H., Jeong, H.D. and Kim, J., Applied Physics Letters, submitted (2005)Google Scholar