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Densification and Crystallization Of Thin Transition Metal Oxide Coatings From Metal Alkoxides

Published online by Cambridge University Press:  28 February 2011

H. Hirashima ,
R. Muratake ,
T. Yamashita  and
T. Chiba
H. Hirashima
Affiliation:
Department of Applied Chemistry,Faculty of Science and Technology,Keio University,3–14–1, Hiyoshi,Kohoku-ku,Yokohama 223Japan
R. Muratake
Affiliation:
Department of Applied Chemistry,Faculty of Science and Technology,Keio University,3–14–1, Hiyoshi,Kohoku-ku,Yokohama 223Japan
T. Yamashita
Affiliation:
Department of Applied Chemistry,Faculty of Science and Technology,Keio University,3–14–1, Hiyoshi,Kohoku-ku,Yokohama 223Japan
T. Chiba
Affiliation:
Department of Applied Chemistry,Faculty of Science and Technology,Keio University,3–14–1, Hiyoshi,Kohoku-ku,Yokohama 223Japan
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Abstract

Monolithic gels of V2O5, Ta2O5 , and Nb2O5 have been prepared from VO(C2H5O)3 , Ta(C2H5O)5 , and Nb(C2H5 O)5 througg hydrolysis in ethanol Solutions. The conditions for gel formation have been determined. Thin coatings of these gels, less than 100 nm in thickness, have been prepared by dip coating. Changes in the thickness, d, and refractive indices, n, have been measured by ellipsometry during drying. In the first stage of drying, d decreases and n increases rapidly. Densification of the coatings takes place due to evaporation of solvent. In the following stage, increase in d and decrease in n have been observed for thin V2O5 gel coatings, about 30 nm or less in thickness. These results suggest that coarsening of pores and/or increase in surface roughness take place due to release of the capillary pressure during drying. Both d and n have increased with increasing number of dipping. After heat treating, decrease in d and increase in n have been observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 611
Copyright
Copyright © Materials Research Society 1990

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References

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