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Crystallization of Pyrolyzed Polysilazanes
Published online by Cambridge University Press: 28 February 2011
Abstract
Polysilazanes are inorganic polymers which convert to a ceramic material when pyrolyzed. Initial pyrolysis results in a solid, amorphous material. Further heating transforms the amorphous structure to a crystalline material. In addition to the Si-N linkages in the polymer backbone, polysilazanes generally contain appreciable amounts of carbon in side groups. Consequently, pyrolysis can result in mixed Si3N4 - SiC crystalline materials. It will be shown that either Si3N4 or SiC could be selectively crystallized depending upon processing conditions.
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