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Correlation of Raman Spectra and Bonding in DLC Films Deposited by Laser Ablation and Laser-Plasma Ablation Techniques

Published online by Cambridge University Press:  15 February 2011

A. Rengan ,
J. Narayan  and
J. L. Park
A. Rengan
Affiliation:
Dept of Materials Science and Engineering, North Carolina State University, Raleigh, N. C. - 27695.
J. Narayan
Affiliation:
Dept of Materials Science and Engineering, North Carolina State University, Raleigh, N. C. - 27695.
J. L. Park
Affiliation:
Solid State Div., Oak Ridge National Laboratory, Oak Ridge, TN-37831, and, M. Li., Chemistry Dept., University of North Carolina, Chapel Hill, NC-27514
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Abstract

We have deposited diamondlike carbon (DLC) films on a variety of substrates from 250° C and higher. The effects of deposition temperature on the properties of DLC films deposited by a conventional laser ablation technique are compared with that of a unique laser-plasma deposition scheme. The calculated values of neff, the effective number of valence electrons, suggest that, with the increase in the deposition temperature, the diamondlike component (sp3 bonds) remains invariant for the laser deposited samples, and increases for the laser-plasma deposited films. Raman measurements show that the Raman allowed ‘G’ band upshifts to ˜1600 cm−1 for both deposition schemes. However, the disorder induced 'D' band remains invariant at ˜1370 cm−2 for the laser ablated samples, and downshifts to ˜1350 cm−1 for the laser-plasma deposited samples. These results suggest a correlation between the diamondlike content (sp3 bonds) and the Raman shift of the ‘D’ band.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 250: Symposium R – Chemical Vapor Deposition of Refractory Metals and Ceramics II , 1991 , 367
Copyright
Copyright © Materials Research Society 1992

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