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Correlation Between Electrical-Optical and Structural Properties of Microcrystalline Silicon N Type Films

Published online by Cambridge University Press:  10 February 2011

R. Martins ,
A. Macarico ,
I. Ferreira ,
R. Nunes ,
A. Bicho  and
E. Fortunato
R. Martins
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
A. Macarico
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
I. Ferreira
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
R. Nunes
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
A. Bicho
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
E. Fortunato
Affiliation:
Materials Science Department of Faculty of Science and Technology of New University of Lisbon and CEMOP-UNINOVA, Quinta da Torre, P-2825 Monte de Caparica, Portugal
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Abstract

Wide band gap microcrystalline silicon films have aroused considerable interest since they combine some electro-optical advantages of amorphous and crystalline materials highly important to produce electro-optical devices such as TFTs and solar cells. In this paper we present results concerning the electro-optical characteristics of highly transparent and conductive n-type µc-Si based films. Here, emphasis is given to the production of n-type ýtc-films with optical gaps of 2.3 eV and dark conductivity's of 6.5 Scm-1

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 420: Symposium A – Amorphous Silicon Technology-1996 , 1996 , 807
Copyright
Copyright © Materials Research Society 1996

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