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Cooling Power Density of SiGe/Si Superlattice Micro Refrigerators

Published online by Cambridge University Press:  01 February 2011

Gehong Zeng ,
Xiaofeng Fan ,
Chris LaBounty ,
Edward Croke ,
Yan Zhang ,
James Christofferson ,
Daryoosh Vashaee ,
Ali Shakouri  and
John E. Bowers
Gehong Zeng
Affiliation:
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106
Xiaofeng Fan
Affiliation:
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106
Chris LaBounty
Affiliation:
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106
Edward Croke
Affiliation:
HRL Laboratories, LLC, Malibu, California, 90265
Yan Zhang
Affiliation:
Baskin School of Engineering, University of California, Santa Cruz, CA 95064
James Christofferson
Affiliation:
Baskin School of Engineering, University of California, Santa Cruz, CA 95064
Daryoosh Vashaee
Affiliation:
Baskin School of Engineering, University of California, Santa Cruz, CA 95064
Ali Shakouri
Affiliation:
Baskin School of Engineering, University of California, Santa Cruz, CA 95064
John E. Bowers
Affiliation:
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106
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Abstract

Experiments were carried out to determine the cooling power density of SiGe/Si superlattice microcoolers by integrating thin film metal resistor heaters on the cooling surface. By evaluating the maximum cooling of the device under different heat load conditions, the cooling power density was directly measured. Both micro thermocouple probes and the resistance of thin film heaters were used to get an accurate measurement of temperature on top of the device. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity, and by providing selective emission of hot carriers through thermionic emission. Various device sizes were characterized. The maximum cooling and the cooling power density had different dependences on the micro refrigerator size. Net cooling over 4.1 K below ambient and cooling power density of 598 W/cm2 for 40 × 40 μm2 devices were measured at room temperature.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 793: Symposium S – Thermoelectric Materials 2003 - Research and Applications , 2003 , S2.2
Copyright
Copyright © Materials Research Society 2004

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