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A Comparison of Deep Levels Generated In InP by Proton and Deuteron Bombardment
Published online by Cambridge University Press: 25 February 2011
Abstract
A predominant deep level which has an activation energy of 0.4 eV was found to have been formed in the region between the surface and the end-of-range of 200 keV ions. In the fluence range 1012 − 1013cm−2 essentially no difference between the deep level spectra for proton and deuteron bombardments was found.
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- Copyright © Materials Research Society 1985
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