Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-25T17:52:28.872Z Has data issue: false hasContentIssue false

Characterization of Self-Assembled SnO 2 Nanoparticles for Fabrication of a High Sensitivity and High Selectivity Micro-Gas Sensor

Published online by Cambridge University Press:  15 March 2011

R.C. Ghan
Affiliation:
Louisiana Tech UniversityInstitute for Micromanufacturing 911 Hergot Avenue, P.O.Box 10137, Ruston, LA, 71270. Fax: (240) 255-4028 Email:[email protected]
Y. Lvov
Affiliation:
Louisiana Tech UniversityInstitute for Micromanufacturing 911 Hergot Avenue, P.O.Box 10137, Ruston, LA, 71270. Fax: (240) 255-4028 Email:[email protected]
R.S. Besser
Affiliation:
Louisiana Tech UniversityInstitute for Micromanufacturing 911 Hergot Avenue, P.O.Box 10137, Ruston, LA, 71270. Fax: (240) 255-4028 Email:[email protected]
Get access

Abstract

In order to refine further the material technology for tin-oxide based gas sensing we are exploring the use of precision nanoparticle deposition for the sensing layer. Layers of SnO2 nanoparticles were grown on Quartz Crystal Microbalance (QCM) resonators using the layer-by-layer self-assembly technique. Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), and Electron Diffraction Pattern (EDP) analyses were performed on the self-assembled layers of SnO2 nanoparticles. The results showed that SnO2 nanoparticle films are deposited uniformly across the substrate. The size of the nanoparticles is estimated to be about 3-5 nm. Electrical characterization was done using standard current-voltage measurement technique, which revealed that SnO2 nanoparticle films exhibit ohmic behavior. Calcination experiments have also been carried out by baking the substrate (with self-assembled nanoparticles) in air at 350°C. Results show that 50%-70% of the polymer layers (which are deposited as precursor layers and also alternately in-between SnO2 nanoparticle monolayers) are eliminated during the process.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1) Madou, M., “Fundamentals of Microfabrication,” (CRC press, 1997), pp. 495500.Google Scholar
2) Hoffheins, B., “Resistive gas sensors,” Chemical and Biological Sensors, ed. Taylor, R.F, Schultz, J.S, (IOP publishing Ltd., 1996) pp. 371377.Google Scholar
3) Morrison, S., “Chemical Sensors,” Semiconductor Sensors, ed. Sze, S. M., (John Wiley & Sons, Inc., 1994), pp. 383412.Google Scholar
4) Ihokura, K., Watson, J.. “Stannic Oxide Gas Sensor,” (CRC press Inc., 1994) pp. 15.Google Scholar
5) Davis, S., Wilson, A., Wright, J., IEE Proc.- Circuits Devices Syst., 145 (5), pp.379, (1998).Google Scholar
6) Ippommatsu, M., Ohnishi, H., Sasaki, H., Matsumoto, T., J. App.Phys., 69, pp.8368, (1991).Google Scholar
7) Decher, G., Science, 277, 1232, (1997).Google Scholar
8) Hettenbach, M. S., “SnO2 (110) and Nano-SnO2: Characterization by Surface Analytical Techniques,” pp. 1820, 2000.Google Scholar
9) Lvov, Y., Ariga, K., Ichinose, I., Kunitake, T., Langmuir, 13, 6195 (1997).Google Scholar
10) Farhat, T., Yassin, G., Dubas, S., Schlenoff, J., Langmuir, 15, 6621 (1999).Google Scholar
11) Hughes, R.C., Ricco, A.J., Butler, M.A., Martin, S.J., Science, 6, 74, (1991).Google Scholar