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Characterization of BaTiO3 Thin Films Deposited by Pulsed-Laser Ablation
Published online by Cambridge University Press: 26 February 2011
Abstract
Thin films of barium titanate (BaTiOs) have been deposited by pulsed-laser ablation onto (001)-oriented MgO substrates. The films were epitactic as evidenced by both x-ray diffraction and ion-channeling techniques. The film surface appeared smooth and contained a low density of particulates. This latter feature is believed to be due to the formation of target pellets having a very high density.
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- Copyright © Materials Research Society 1991
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