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Amorphous Silicon Sensor Arrays for X-Ray and Document Imaging

Published online by Cambridge University Press:  10 February 2011

R. A. Street ,
R. B. Apte ,
S. E. Ready ,
R. L. Weisfield  and
P. Nylen
R. A. Street
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
R. B. Apte
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
S. E. Ready
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
R. L. Weisfield
Affiliation:
dpiX, 3406 Hillview Avenue, Palo Alto, CA 94304
P. Nylen
Affiliation:
Dept of Physics, Stockholm University, Stockholm, Sweden
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Abstract

Large area amorphous silicon image sensor arrays are important for x-ray medical imaging and document scanning as well as a variety of other applications where large sensor size is required. The paper first summarizes the present state of the flat panel x-ray imager technology, and compares the two main approaches for x-ray detection. We then describe the performance of a new, large area, high resolution, radiographic imager based on a single amorphous silicon array with 2304×3200 pixels, and an active area of 30×40 cm (12×1 6”).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 487: Symposium I – Semiconductors for Room-Temperature Radiation II , 1997 , 399
Copyright
Copyright © Materials Research Society 1998

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