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Work Function Effects of Nano Structured ZnO Thin Film on the Acetone Gas Sensitivity

Published online by Cambridge University Press:  31 January 2011

Seung Hyun Jee ,
Nitul Kakati ,
Soo Ho Kim ,
Dong-Joo Kim  and
Young Soo Yoon
Seung Hyun Jee
Affiliation:
[email protected], Yonsei University, School of Advanced Material Engineering, Seoul, 120-749, Korea, Republic of
Nitul Kakati
Affiliation:
[email protected], Yonsei University, School of Advanced Material Engineering, Seoul, 120-749, Korea, Republic of
Soo Ho Kim
Affiliation:
[email protected], Yonsei University, School of Advanced Material Engineering, Seoul, 120-749, Korea, Republic of
Dong-Joo Kim
Affiliation:
[email protected], Auburn University, Dept. of Mechanical Engineering, Auburn, Alabama, United States
Young Soo Yoon
Affiliation:
[email protected], Yonsei University, School of Advanced Material Engineering, Seoul, 120-749, Korea, Republic of
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Abstract

We deposited various nano structured ZnO thin films with plasma treatment on an alumina substrate and fabricate ZnO sensors for acetone detection. The ZnO sensors with various nano structures and the plasma treatment were deposited by radio frequency (RF) magnetron sputtering method with RuO2 micro heater and Ru electrode. In order to control a work function intentionally, the various deposition conditions and the plasma treatment were used. Sensitivities of the ZnO sensor were measured in acetone vapor and air at 250 degree C. In conclusion, we suggested that the sensitivity of ZnO sensors for acetone strongly depends on the work function of the as-deposited or plasma treated nano structured ZnO thin films.

Keywords

sensorelectrical propertiesx-ray photoelectron spectroscopy (XPS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1174: Symposium V – Functional Metal-Oxide Nanostructures , 2009 , 1174-V06-23
Copyright
Copyright © Materials Research Society 2009

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