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Structural Properties of a-Ge1-xCx:H Alloys Prepared by the RF Sputtering Technique

Published online by Cambridge University Press:  15 February 2011

F. C. Marques ,
J. Vilcarromero  and
F. L. Freire Jr
F. C. Marques
Affiliation:
Instituto de Física “Gleb Wataghin” Universidade Estadual de Campinas, UNICAMP CP 6165, 13081–970, Campinas, SP, Brazil
J. Vilcarromero
Affiliation:
Instituto de Física “Gleb Wataghin” Universidade Estadual de Campinas, UNICAMP CP 6165, 13081–970, Campinas, SP, Brazil
F. L. Freire Jr
Affiliation:
Departamento de Física, PUC-Rio - Pontificia Universidade Católica do Rio de Janeiro CP 38071, 22453–970 Rio de Janeiro, RJ, Brazil
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Abstract

Structural and mechanical properties of hydrogenated amorphous germanium carbon (a-Ge1-xCx:H) alloys are presented. The films were prepared by the rf-co-sputtering technique using a graphite/germanium composed target. The carbon and germanium relative concentrations were determined by RBS, and the total hydrogen concentration by ERDA measurements. An increase in the optical gap was measured for low carbon content (0 < × < 0.15). For higher values of x the optical gap is almost constant. Infrared transmission absorption spectra show several absorption bands related to Ge-C stretching, C-Hn (n = 1,2,3) and Ge-H stretching and bending modes. The mechanical internal stress was strongly affected by the incorporation of carbon. The trends of the optical gap, refractive index, infrared absorption and mechanical stress as a function of the carbon content suggest that the high carbon concentration alloys have polymeric and/or graphite-like contribution in their structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 467: Symposium A – Amorphous and Microcrystalline Silicon Technology - 1997 , 1997 , 537
Copyright
Copyright © Materials Research Society 1997

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