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A Simple Method of Tip Shape Calibration for Nano-Indentation Test of Thin Films

Published online by Cambridge University Press:  11 February 2011

Koichiro Hattori ,
Junhua Xu ,
Hidetoshi Nakano  and
Isao Kojima
Koichiro Hattori
Affiliation:
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Umezono1–1–1, Tsukuba, Ibaraki 305–8563, Japan.
Junhua Xu
Affiliation:
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Umezono1–1–1, Tsukuba, Ibaraki 305–8563, Japan.
Hidetoshi Nakano
Affiliation:
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Umezono1–1–1, Tsukuba, Ibaraki 305–8563, Japan.
Isao Kojima
Affiliation:
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, Umezono1–1–1, Tsukuba, Ibaraki 305–8563, Japan.
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Abstract

We have evaluated the hardness and elastic properties of thin films by using a simple procedure to calibrate the tip shape effect of the nano-indentation data. For the simplification, a truncated-shape approximation and linear fit are used to estimate the tip-shape and contact stiffness, respectively, substituting for polynomial area-function and power-law fit. The parameters used in the correction were determined by a fused silica and a single crystal silicon (100) surface. Different film/substrate systems are designed in order to assess these fitted parameters used in the correction. The transition behavior observed from the film to the substrate is well coincide with the other film thickness results, where the indentation depth above 50nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 750: Symposium Y – Surface Engineering 2002–Synthesis, Characterization and Applications , 2002 , Y8.20
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

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