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The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics

Published online by Cambridge University Press:  01 February 2011

David W. Gidley ,
Richard S. Vallery  and
Ming Liu
David W. Gidley
Affiliation:
[email protected], University of Michigan, Physics, 450 Church St., Randall Laboratory, Ann Arbor, MI, 48109-1040, United States, 734-936-1134, 734-763-4934
Richard S. Vallery
Affiliation:
[email protected], University of Michigan, Physics, Ann Arbor, MI, 48109-1040, United States
Ming Liu
Affiliation:
[email protected], University of Michigan, Physics, Ann Arbor, MI, 48109-1040, United States
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Abstract

Extended abstract to Symposium B

Keywords

porositydielectricporosimetry
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B02-06
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1 Gidley, D. W., Peng, H-G., and Vallery, R. S., Annual Review of Materials Research 36, 49 (2006).Google Scholar
2 Gidley, D. W., Peng, H-G., and Vallery, R. S., in Dielectric Films for Advanced Microelectronics, edited by Maex, K., Baklanov, M., and Green, M. (John Wiley and Sons, LTD, 2007), p. 85.Google Scholar
3 Juneja, J. S., Eyck, G. A. Ten, Bakhru, H., and Lu, T.-M., J. Vac. Sci. Technol. B 23, 2232 (2005).Google Scholar
4 Ro, H. W., Jones, R. L., Peng, H.-G., Hines, D. R., Lee, H.-J., Lin, E. K., Karim, A., Yoon, D. Y., Gidley, D. W., and Soles, C. L., to be published in Adv. Mater. (2007).Google Scholar