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Properties of Phase Change Materials Modified by Ion Implantation

Published online by Cambridge University Press:  13 July 2011

Simone Raoux ,
Guy M. Cohen ,
Marinus Hopstaken ,
Siegfried Maurer  and
Jean L. Jordan Sweet
Simone Raoux
Affiliation:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598, USA
Guy M. Cohen
Affiliation:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598, USA
Marinus Hopstaken
Affiliation:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598, USA
Siegfried Maurer
Affiliation:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598, USA
Jean L. Jordan Sweet
Affiliation:
IBM T. J. Watson Research Center, P. O. Box 218, Yorktown Heights, New York 10598, USA
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Abstract

Ion implantation of germanium and carbon ions into thin films of Ge2Sb2Te5 (GST) and GeTe was applied to modify the properties of these phase change materials. It was found that it is possible to amorphize crystalline GST and GeTe using ion implantation for optimized ion doses and energies which depend on the film thickness, ion species and capping layer. A relatively low minimum dose is required for complete amorphization as judged by the absence of diffraction peaks in x-ray diffraction (XRD) scans. It is 4–5×1013 cm−2 for germanium implantation into GST, and slightly higher (1014 cm−2) for germanium implantation into GeTe. The properties of the re-amorphized films depend on ion species, dose and energy. The re-crystallization temperature of re-amorphized GST by ion implantation is comparable or higher than as-deposited amorphous GST. Carbon implantation in particular leads to a large increase in the crystallization temperature Tx. A carbon dose of 1016 cm−2 implanted into 20 nm amorphous GST yielded a crystallization temperature of 300 ºC, much higher than the crystallization temperature of 160 ºC we recorded for as-deposited, amorphous GST. Similarly, high dose carbon implantation into amorphous GeTe leads to large increase in Tx. We recorded a shift in Tx from 195 ºC for as-deposited GeTe to 400 ºC for C-implanted GeTe. Crystalline GeTe re-amorphized by a low dose germanium ion implantation exhibits a re-crystallization temperature below Tx of as-deposited amorphous GeTe and Tx increased with the implanted Ge dose to a crystallization temperature above that of unimplanted GeTe. Ion implantation can be regarded an additional tool to create phase change materials with different and improved switching properties that cannot be achieved by conventional sputter deposition.

Keywords

phase transformationion-implantationmemory
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1338: Symposium R – Phase-Change Materials for Memory and Reconfigurable Electronics Applications , 2011 , mrss11-1338-r05-06
Copyright
Copyright © Materials Research Society 2011

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