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Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

Published online by Cambridge University Press:  10 February 2011

A.A. Maznev ,
M.J. Banet ,
M. Gostein ,
R.B. Hanselman ,
M.A. Joffe ,
R. Sacco  and
K.A. Nelson
A.A. Maznev
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
M.J. Banet
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
M. Gostein
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
R.B. Hanselman
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
M.A. Joffe
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
R. Sacco
Affiliation:
Philips Analytical, 12 Michigan Dr., Natick, MA 01760, [email protected]
K.A. Nelson
Affiliation:
Dept. of Chemistry, Massachusetts Institute of Technology Cambridge, MA 02139
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Abstract

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 591 , 1999 , 195
Copyright
Copyright © Materials Research Society 2000

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References

REFERENCES

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