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Nuclear Magnetic Resonance Spectroscopy in the Study of Diamond Thin Films

Published online by Cambridge University Press:  26 February 2011

Karen Mary McNamara ,
K. K. Gleason  and
M. W. Geis
Karen Mary McNamara
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
K. K. Gleason
Affiliation:
Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
M. W. Geis
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, MA 02173
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Abstract

Nuclear magnetic resonance spectroscopy has been used to study diamond thin films grown in a low-pressure hot-filament reactor from 13C-labeled acetone. Film quality is assessed, and the origin of deposited carbon determined. Carbon atoms from both bonding environments in the acetone molecule deposit to form only sp 3-bonded material. The relative rate of incorporation of these carbon atoms is determined. Experimental results and equilibrium calculations demonstrate that CO acts as a precursor for diamond growth in the absence of heterogeneous kinetics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 162: Symposium F – Diamond, Silicon Carbide and Related Wide Bandgap Semiconductors , 1989 , 207
Copyright
Copyright © Materials Research Society 1990

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