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Microstructural development during Fabrication of Ti:LiNbC3 Optical Waveguides
Published online by Cambridge University Press: 21 February 2011
Abstract
The microstructural development of Ti:LiNbO3 optical waveguides as a function of annealing time and temperature was studied using transmission electron microscopy. The morphological evolution of the deposited Ti film can be characterized by three stages: (i) oxidation beginning at low temperatures, (ii) coarsening and secondary grain growth of the oxide film at higher temperatures and (iii) eventual film breakup and void formation. Secondary grain growth is driven by minimization of interfacial energy of grains which have a special epitaxial relationship with respect to the LiNbO3 substrate.
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