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Evolution of Surface Roughness of a Strained Epitaxial Film Due to Interface Misfit Dislocations
Published online by Cambridge University Press: 15 February 2011
Abstract
The appearance of misfit dislocations at the interface between a strained layer and its substrate induces a nonuniform chemical potential along the surface of the layer. Under the assumption that the resulting chemical potential gradient will drive coherent mass rearrangement by surface diffusion, a model of evolution of surface shape is considered which leads to estimates of the surface roughness induced by this mechanism.
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- Copyright © Materials Research Society 1994
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