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Embedded Circuitry in Polymeric Films by Linear Energy Transfer (Let) of MeV Ions

Published online by Cambridge University Press:  22 February 2011

D. Ila ,
A. L. Evelyn  and
Y. Qian
D. Ila
Affiliation:
Center for Irradiation of Materials, Alabama A&M University, P.O. Box 1447, Normal, AL 35762-1447, U.S.A.
A. L. Evelyn
Affiliation:
Center for Irradiation of Materials, Alabama A&M University, P.O. Box 1447, Normal, AL 35762-1447, U.S.A.
Y. Qian
Affiliation:
Center for Irradiation of Materials, Alabama A&M University, P.O. Box 1447, Normal, AL 35762-1447, U.S.A.
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Abstract

We have developed a technique to fabricate embedded variable conductivity paths in phenolformaldehyde, PF-resin, with resistivity as high as 109 Ω-cm. The resin used for this work consists of a monomer called Phenyl Methanol (Resol) which upon setting at 150ºC will form short chains of polymers with high resistivity. The conductive paths are produced at depths of 4 to 35 micrometers by changing the energy of thebombarding ions. The resistivity of each path is controlled between 109 Ω-cm to 10 Ω-cm by adjusting the ion dose. The ions used in this work are nitrogen, alphas and protons with energies between 0.5 and 6.5 MeV to form conductive paths as narrow as 0.5 mm and as wide as 4 mm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 338: Symposium – Materials Reliability in Microelectronics IV , 1994 , 613
Copyright
Copyright © Materials Research Society 1994

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References

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